Gas Phase Diagnostics of CVD Diamond Growth From Chloromethane and Chloroform

Author

James M. Chenault, University of Tennessee - Knoxville

Date of Award

12-1998

Degree Type

Thesis

Degree Name

Master of Science

Major

Chemistry

Major Professor

Charles S. Feigerle

Committee Members

Robert Hinde, Ben Xue

Abstract

Low energy electron impact ionization (LEEII) time of flight mass spectrometry (TOFMS) has been used to interrogate gases sampled through an orifice from a diamond growth surface. Methane, chloromethane and chloroform precursor gases were examined to produce electron energy plots of the fragment ions that occur using LEEII. Filament temperature studies were completed covering temperatures from room temperature to over 2000 °C, and the results were compared to the LEEII plots. The monochloromethyl radical has been detected in the experiments using chloroform and the effect of a pretreatment with this radical present has been shown to enhance diamond nucleation. Scanning electron microscopy (SEM) and Raman spectroscopy have been used to confirm diamond growth.

Recommended Citation

Chenault, James M., "Gas Phase Diagnostics of CVD Diamond Growth From Chloromethane and Chloroform. " Master's Thesis, University of Tennessee, 1998.
https://trace.tennessee.edu/utk_gradthes/1471