MEMS cantilever sensor system with CMOS readout circuit

Date Issued
December 1, 1998
Author(s)
Jones, Robert Leonard
Advisor(s)
James M. Rochelle
Additional Advisor(s)
Michael J. Roberts
Charles L. Britton Jr.
Permanent URI
Degree
Master of Science
Major
Electrical Engineering
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Thesis98J67.pdf

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9.63 MB

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