A large volume microwave plasma facility for plasma ion implantation studies

A multimode microwave cavity resonator to generate and contain in the steady state a large volume plasma was designed and fabricated. This microwave plasma facility is intended for plasma ion implantation studies using a high-voltage switching circuit which was also designed, fabricated, and tested. The cavity is energized by a 3 kW, 2.45 GHz microwave generator operating in the TE₀₁ mode. The facility provides for enhancement of the confinement of plasma electrons by installing many oriented ceramic permanent magnets on the outer cavity surface. The facility was tested in terms of it base pressure (2 x 10^-6 torr), background mass spectra, and microwave impedance matching. With this information, the plasma can be created and maintained for plasma ion implantation studies.