Date of Award

8-2011

Degree Type

Thesis

Degree Name

Master of Science

Major

Materials Science and Engineering

Major Professor

Philip D Rack

Committee Members

Thomas Meek, Charles Feigerle

Abstract

This thesis focuses on the preparation parameter and characterization of boron and boron nitride thin film. System is built composing of designing the geometry, substrate and target holder, pumping parts and plasma generated parts. Experiments with various conditions have been tried and the optimized condition is found for the film growth rate. Many ways of characterization includes: X-ray diffraction, Scanning electron microscopy, Raman spectroscopy, Fourier transform infrared spectroscopy have been tried to identify the material composition.

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